APPLICATIONS
(For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes
(For Model ESA25-100) Ideal for light gas pumping MOCVD processing
EBARA ESA25S干式真空泵技术参数：
|
Pumping Speed 50/60 Hz
|
CFM
|
88/106
|
|
L/min
|
2500/3000
|
|
m3/Hr
|
150 / 180
|
|
Ultimate Pressure 50/60 Hz
|
mTorr
|
38 / 30
|
|
Pa
|
5.3 / 4.0
|
|
mBar
|
0.053 / 0.04
|
|
Connection
|
Gas Inlet
|
NW 50
|
|
Gas Outlet
|
NW 40
|
|
Power at Ultimate Pressure
|
KW
|
|
|
Maximum Power
|
KW
|
|
|
Cooling Water Requirements
|
Min. Flow Rate
L/min
|
3.5
|
|
Bearing and Dilution N2
|
Bearing Seals
L/min
|
11
|
|
Cabinet Dimensions
LxWxH
|
inches
|
35.4 x 15.5 x 19.7
|
|
mm
|
900 x 394 x 500
|
|
Weight
|
lbs
|
528
|
|
kg
|
240
|
