APPLICATIONS
(For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes
(For Model ESA25-100) Ideal for light gas pumping MOCVD processing
EBARA ESA300W干泵技术参数：
|
Pumping Speed 50/60 Hz
|
CFM
L/min
M3/Hr
|
1,060
30,000
1,800
|
|
Ultimate Pressure 50/60 Hz
|
mTorr
Pa
mBar
|
4
0.53
0.0053
|
|
Connection
|
Gas Inlet
|
ISO 100
|
|
Gas Outlet
|
NW 40
|
|
Power at Ultimate Pressure
|
KW
|
7.3
|
|
Maximum Power
|
KW
|
12.5
|
|
Cooling Water Requirements
|
Min. Flow Rate
L/min
|
6
|
|
Bearing and Dilution N2
|
Bearing Seals
L/min
|
5
|
|
Cabinet Dimensions
LxWxH
|
inches
mm
|
43.7 x 24.4 x 35.6
1110 x 620 x 905
|
|
Weight
|
lbs
kg
|
1543
700
|
