APPLICATIONS
(For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes
(For Model ESA25-100) Ideal for light gas pumping MOCVD processing
EBARA ESA100W真空泵技术参数：
|
Pumping Speed 50/60 Hz
|
CFM
L/min
M3/Hr
|
353
10000
600
|
|
Ultimate Pressure 50/60 Hz
|
mTorr
Pa
mBar
|
0.000002
0.27
0.0027
|
|
Connection
|
Gas Inlet
|
NW 50
|
|
Gas Outlet
|
NW 40
|
|
Power at Ultimate Pressure
|
KW
|
3.4
|
|
Maximum Power
|
KW
|
5.2
|
|
Cooling Water Requirements
|
Min. Flow Rate
L/min
|
3.5
|
|
Bearing and Dilution N2
|
Bearing Seals
L/min
|
12
|
|
Cabinet Dimensions
LxWxH
|
inches
mm
|
41 x 15.7 x 31.9
1041 x 400 x 810
|
|
Weight
|
lbs
kg
|
882
400
|
