APPLICATIONS
(For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes
(For Model ESA25-100) Ideal for light gas pumping MOCVD processing
EBARA ESA70W干泵技术参数：
|
Pumping Speed 50/60 Hz
|
CFM
L/min
M3/Hr
|
274/296
7000/8400
420/504
|
|
Ultimate Pressure 50/60 Hz
|
mTorr
Pa
mBar
|
3/2
0.4/0.27
0.004/0.0027
|
|
Connection
|
Gas Inlet
|
NW 50
|
|
Gas Outlet
|
NW 40
|
|
Power at Ultimate Pressure
|
KW
|
|
|
Maximum Power
|
KW
|
|
|
Cooling Water Requirements
|
Min. Flow Rate
L/min
|
3.5
|
|
Bearing and Dilution N2
|
Bearing Seals
L/min
|
15
|
|
Cabinet Dimensions
LxWxH
|
inches
mm
|
39.3 x 15.7 x 31.5
997 x 400 x 800
|
|
Weight
|
lbs
kg
|
836
380
|
