满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA EST干式真空泵应用： High Pumping Speed / High Gas Load Requirement CVD Process Etching Process
EBARA EST25N荏原真空泵技术参数：
Pumping Speed 50/60 Hz
CFM
88
L/min
2,500
m3/Hr
150
Ultimate Pressure 50/60 Hz
mTorr
20
Pa
2.67
mBar
0.267
Connection
Gas Inlet
NW 40
Gas Outlet
Power at Ultimate Pressure
KW
3
Maximum Power
5.5
Cooling Water Requirements
Min. Flow Rate L/min
5
Bearing and Dilution N2
Bearing Seals L/min
8 to 10
Cabinet Dimensions LxWxH
inches
39 x 16 x 19.7
mm
990 x 410 x 501
Weight
lbs
661
kg
300
