满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA EST干式真空泵应用： High Pumping Speed / High Gas Load Requirement CVD Process Etching Process
EBARA EST500WN真空泵技术参数：
Pumping Speed 50/60 Hz
CFM
1767
L/min
50,000
m3/Hr
3,000
Ultimate Pressure 50/60 Hz
mTorr
3
Pa
0.4
mBar
0.004
Connection
Gas Inlet
ISO 160
Gas Outlet
NW 40
Power at Ultimate Pressure
KW
4.6
Maximum Power
11.3
Cooling Water Requirements
Min. Flow Rate L/min
5
Bearing and Dilution N2
Bearing Seals L/min
16 to 18
Cabinet Dimensions LxWxH
inches
39 x 20.5 x 34.4
mm
990 x 520 x 873
Weight
lbs
1212
kg
550
