满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA EST干式真空泵应用： High Pumping Speed / High Gas Load Requirement CVD Process Etching Process
EBARA EST100WN荏原真空泵技术参数：
Pumping Speed 50/60 Hz
CFM
353
L/min
10,000
m3/Hr
600
Ultimate Pressure 50/60 Hz
mTorr
3
Pa
0.4
mBar
0.004
Connection
Gas Inlet
NW 50
Gas Outlet
NW 40
Power at Ultimate Pressure
KW
3.8
Maximum Power
7.7
Cooling Water Requirements
Min. Flow Rate L/min
5
Bearing and Dilution N2
Bearing Seals L/min
14 to 17
Cabinet Dimensions LxWxH
inches
39 x 16 x 33.5
mm
990 x 410 x 851
Weight
lbs
926
kg
420
