EBARA EV-S干式真空泵应用：
SEM
Ion Implant
Ashing
Load Lock
MetalPDV
Dielectric ETCH
日本荏原EBARA EV-S100真空泵技术参数：
|
|
Units
|
EV-S100
|
EV-S100P
|
EV-S100N
|
|
Max Pumping Speed
|
CFM
|
353.1
|
353.1
|
353.1
|
|
L/min
|
10,000
|
10,000
|
10,000
|
|
m3/Hr
|
600
|
600
|
600
|
|
Ultimate Pressure
|
Torr
|
3.75E-02
|
3.75E-02
|
3.75E-02
|
|
Pa
|
0.5
|
0.5
|
0.5
|
|
mBar
|
0.005
|
0.005
|
0.005
|
|
Connection
|
Gas Inlet
|
ISO80
|
ISO80
|
ISO80
|
|
Gas Outlet
|
NW40
|
NW40
|
NW40
|
|
Power at Ultimate Pressure
|
KW
|
0.65
|
0.65
|
0.65
|
|
Maximum Power
|
KW
|
4.6
|
4.6
|
4.6
|
|
Cooling Water Requirements
|
L/min
|
2.0 - 3.0
|
2.0 - 3.0
|
2.0 - 3.0
|
|
Cabinet Dimensions
|
inches
|
20.1 x 10.2 x 21.7
|
20.1 x 10.2 x 21.7
|
20.1 x 10.2 x 21.7
|
|
Size (LxWxH)
|
mm
|
510 x 260.1 x 549.9
|
510 x 260.1 x 549.9
|
510 x 260.1 x 549.9
|
|
Weight
|
lbs
|
264.6
|
264.6
|
264.6
|
|
kg
|
120.0
|
120.0
|
