满足通用真空需求的领先技术。针对不同的要求和行业。
Flange
Inlet
CF63
Outlet
KF16
Volume Flow Rate
N2 (L/s)
75
N2 with protective screen (L/s)
70
H2 (L/s)
45
Maximum Compression Ratio
N2
1 x 108
H2
1 x 105
Ultimate Pressure
Torr
< 7.5 x 10-10
Pa
< 1 x 10-7
Maximum Throughput
N2 (sccm)
10
N2 (Pa x L/s)
18
Ar (sccm)
5
Ar (Pa x L/s)
9.2
Maximum Backing Pressure
9.0
1200
Recommended Backing Pump
L/min
≥ 25
CFM
≥ 0.8
Startup Time
min
2.0 - 2.5
Shutdown Time
20.0 - 25.0
Vibration Level (0 - peak)
μm
≤ 0.2
Rated Rotational Speed
min-1
90000
Installation Position
Any
Cooling System
Free Convection Air Cooling
Bearing System
Grease-Lubricated Ball Bearing
Permissible Ambient Temperature
Deg C
8.0-38.0
Deg F
46-100
Major Materials
Al Alloy
Weight
kg
5.0
lb
11.0
Bearing Life
hours
