干式真空泵

满足通用真空需求的领先技术。针对不同的要求和行业。

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EBARA EBT450分子泵
来源: | 作者:Ebara真空泵维修 | 发布时间: 2021-02-07 | 30 次浏览 | 🔊 点击朗读正文 ❚❚ ▶ | 分享到:

Flange

Inlet

CF160

Outlet

KF25

Volume Flow Rate

N2 (L/s)

450

N2 with protective screen (L/s)

430

H2 (L/s)

240

Maximum Compression Ratio

N2

1 x 108

H2

2 x 103

Ultimate Pressure

Torr

< 7.5 x 10-9

Pa

< 1 x 10-6

Maximum Throughput

N2 (sccm)

500

N2 (Pa x L/s)

920

Ar (sccm)

250

Ar (Pa x L/s)

460

Maximum Backing Pressure

Torr

2.0

Pa

260>

Recommended Backing Pump

L/min

≥ 80

CFM

≥ 2.8>

Startup Time

min

2.0 - 2.5

Shutdown Time

min

5.0 - 6.5

Vibration Level (0 - peak)

μm

≤ 0.2

Rated Rotational Speed

min-1

45000

Installation Position

 

Any

Cooling System

 

Forced Air Cooling

Bearing System

 

Grease-Lubricated Ball Bearing

Permissible Ambient Temperature

Deg C

10.0-32.0

Deg F

50-90>

Major Materials

 

Al Alloy

Weight

kg

10.0

lb

22.0>

Bearing Life

hours

20,000