APPLICATIONS
(For Model ESA200-500) Ideal for large-volume atmospheric, load lock processes
(For Model ESA25-100) Ideal for light gas pumping MOCVD processing
EBARA ESA500W干式真空泵技术参数：
|
Pumping Speed 50/60 Hz
|
CFM
L/min
M3/Hr
|
1766
50000
3000
|
|
Ultimate Pressure 50/60 Hz
|
mTorr
Pa
mBar
|
7.5*10-6
1
0.01
|
|
Connection
|
Gas Inlet
|
ISO 100
|
|
Gas Outlet
|
NW 50
|
|
Power at Ultimate Pressure
|
KW
|
6.7
|
|
Maximum Power
|
KW
|
24.1
|
|
Cooling Water Requirements
|
Min. Flow Rate
L/min
|
6
|
|
Bearing and Dilution N2
|
Bearing Seals
L/min
|
6
|
|
Cabinet Dimensions
LxWxH
|
inches
mm
|
60.5 x 24.4 x 41.1
1537 x 620 x 1045
|
|
Weight
|
lbs
kg
|
1650
750
|
