干式真空泵
满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA EV-S干式真空泵应用：
SEM
Ion Implant
Ashing
Load Lock
MetalPDV
Dielectric ETCH
EBARA EV-S50干泵技术参数：
|
Units |
EV-S50 |
EV-S50P |
EV-S50N |
|
|
Max Pumping Speed |
CFM |
177 |
177 |
177 |
|
L/min |
5,000 |
5,000 |
5,000 |
|
|
m3/Hr |
300 |
300 |
300 |
|
|
Ultimate Pressure |
Torr |
3.75E-02 |
3.75E-02 |
3.75E-02 |
|
Pa |
0.5 |
0.5 |
0.5 |
|
|
mBar |
0.005 |
0.005 |
0.005 |
|
|
Connection |
Gas Inlet |
NW50 |
NW50 |
NW50 |
|
Gas Outlet |
NW25 |
NW25 |
NW25 |
|
|
Power at Ultimate Pressure |
KW |
0.55 |
0.55 |
0.55 |
|
Maximum Power |
KW |
3.6 |
3.6 |
3.6 |
|
Cooling Water Requirements |
L/min |
2.0 - 3.0 |
2.0 - 3.0 |
2.0 - 3.0 |
|
Cabinet Dimensions |
inches |
17.7 x 9.1 x 20.5 |
17.7 x 9.1 x 20.5 |
17.7 x 9.1 x 20.5 |
|
Size (LxWxH) |
mm |
450 x 230 x 520 |
450 x 230 x 520 |
450 x 230 x 520 |
|
Weight |
lbs |
220.4 |
220.4 |
220.4 |
|
kg |
100 |
100 |
100 |
