满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA ESR干泵应用： Load Lock and Transfer Clean Gases and Processes Sputtering PVD
EBARA ESR300WN干式真空泵技术参数：
Pumping Speed 50/60 Hz
CFM L/min M3/Hr
1059 30,000 1,800
Ultimate Pressure 50/60 Hz
mTorr Pa mBar
1.5 0.2 0.002
Connection
Gas Inlet
NW 100
Gas Outlet
NW 40
Power at Ultimate Pressure
KW
2.9
Maximum Power
7.5
Cooling Water Requirements
Min. Flow Rate L/min
3.5
Bearing and Dilution N2
Bearing Seals L/min
2 to 12
Cabinet Dimensions LxWxH
inches mm
33 x 19 x 35 (825 x 460 x 880)
Weight
lbs kg
860 390
