满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA ESR干泵应用： Load Lock and Transfer Clean Gases and Processes Sputtering PVD
EBARA ESR200WN干式真空泵技术参数：
Pumping Speed 50/60 Hz
CFM L/min M3/Hr
353 - 706 10,000 - 20,000 600 - 1,200
Ultimate Pressure 50/60 Hz
mTorr Pa mBar
1 0.13 0.0013
Connection
Gas Inlet
ISO100
Gas Outlet
NW 40
Power at Ultimate Pressure
KW
0.8 - 1.1
Maximum Power
5
Cooling Water Requirements
Min. Flow Rate L/min
2
Bearing and Dilution N2
Bearing Seals L/min
2 to 12
Cabinet Dimensions LxWxH
inches mm
31.1 x 15 x 25.8 790 x 380 x 644
Weight
lbs kg
520 250
