满足通用真空需求的领先技术。针对不同的要求和行业。
EBARA ESR干泵应用： Load Lock and Transfer Clean Gases and Processes Sputtering PVD
EBARA ESR30N干式真空泵技术参数：
Pumping Speed 50/60 Hz
CFM L/min M3/Hr
105 3000 180
Ultimate Pressure 60 Hz
mTorr Pa mBar
5.03*10-6 0.67 0.0067
Connection
Gas Inlet
NW 50
Gas Outlet
NW 40
Power at Ultimate Pressure
KW
1.7
Maximum Power
3.5
Cooling Water Requirements
Min. Flow Rate L/min
Bearing and Dilution N2
Bearing Seals L/min
12
Cabinet Dimensions LxWxH
inches mm
29.9 x 15.7 x 18.0 760 x 400 x 458
Weight
lbs kg
418 190
